Micro-Electrical-Mechanical Systems




Micro Electrical Mechanical Systems

Micro Electro Mechanical Systems

Micro-Electrical-Mechanical System

Micro-Electro-Mechanical System

Micro-Electro-Mechanical Systems

System, Micro-Electrical-Mechanical

System, Micro-Electro-Mechanical

Systems, Micro-Electrical-Mechanical

Systems, Micro-Electro-Mechanical

A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.